Magnetron sputtering: a review of recent developments and applications
نویسندگان
چکیده
Magnetron sputtering has become the process of choice for the deposition of a wide range of industrially important coatings. Examples include hard, wear-resistant coatings, low friction coatings, corrosion resistant coatings, decorative coatings and coatings with speci"c optical, or electrical properties. Although the basic sputtering process has been known and used for many years, it is the development of the unbalanced magnetron and its incorporation into multi-source &closed-"eld' systems that have been responsible for the rise in importance of this technique. Closed-"eld unbalanced magnetron sputtering (CFUBMS) is an exceptionally versatile technique for the deposition of high-quality, well-adhered "lms. The development, fundamental principles and applications of the CFUBMS process are, therefore, discussed in some detail in this review. Also discussed are other important recent developments in this area, including the pulsed magnetron sputtering process, variable "eld magnetrons, and the combining of sputtering techniques with other surface coating, or surface modi"cation techniques in duplex production processes. ( 2000 Elsevier Science Ltd. All
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